Blue M Inert Gas Oven UP 550 Control


The Blue M Inert Gas Oven is intended for the thermal treatment of materials at temperatures between 50°C and 593° C. The primary function of the oven is the curing of polyimide resin for the fabrication of MEMS devices. Other materials may be used- with the specific permission of Facility management. It is imperative to obtain this permission prior to using other materials. Failure to obtain proper permission will result in disciplinary action.


Instrument specifications are provided on labs portal:

Access And Usage

Research Only
In Use