Aixtron BM 4 Chemical Vapor Deposition (CVD) system.


"The Aixtron Black Magic CVD furnace is dedicated to graphene and carbon nanotube synthesis and can accommodate multiple pieces or a single 4"" wafer- with methane- acetylene- nitrogen- ammonia- compressed dry air and hydrogen available as process gases. Process recipes have been optimized and are available to the user for the following: Cu foil (to be provided by the user)- Cu-coated substrates- and Ni substrates. The recipes on Cu have been characterized to give excellent monolayer coverage with minimal areas of bilayers and low defectivity. Ni substrates will give multi-monolayer growth. We also have established recipes for Multi wall- Straight vertical and fast/dense growth carbon nanotubes"


Instrument specifications are provided on labs portal:

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