AJA Orion 300 Plasma Sputterer.


The AJA Orion 300 sputterer is a versatile- load locked PVD system with 5 magnetron- 2 RF- substrate biasing and in-situ heating. It also comes with a dual output- DC power supply. The RF supplies can go up to a maximum of 600W (ramping). The heater can go up to 400C with PID control. A large variety of materials can be deposited in this system. Contact staff if you’d like to deposit (add your material) into our rotation list. Process Gasses Available: Ar- O2


Instrument specifications are provided on labs portal: https://labs.masdar.ac.ae/index.php/equipment-portal

Access And Usage

Research Only
In Use